表面热功能结构制造领域发展及关键技术.pdf

第 23 卷 第 1 期 中 国 表 面 工 程 Vol.23 No.1 第 1 期 陈 爽等：铝阳极氧化膜的硫酸钇脉冲封闭 49 2010 年 2 月 CHINA SURFACE ENGINEERING Feburary 2010 doi: 10.3969/j.issn.1007−9289.2010.01.001 表面热功能结构制造领域的发展及关键技术* 汤 勇，潘敏强，汤兴贤 （华南理工大学机械与汽车工程学院，广州 510640 ） 摘 要：表面热功能结构是指在固体表面加工出具有不同形貌、不同尺度、不同维数，并具有散热或传热功能的结构。 复杂表面热功能结构在高集成度芯片热控制方面有着广阔的应用前景。如何根据热功能需求主动设计表面结构并提出 适合高效率低成本的制造方法是解决高热流密度问题的核心所在。在对当前表面热功能结构的发展现状分析基础上， 较详细论述了表面热功能结构制造领域的关键技术，指出未来表面热功能结构研究的重点应集中在结构的微细化和复 杂化、表面热功能结构的高效低成本制造方法等方面。 关键词：表面功能结构；热流密度；微热管；亚结构；微结构 中图分类号：TH16 文献标识码：A 文章编号：1007–9289(2010)01–0001–08 Development and Key Manufacture Technique of Functional Surface Structures for Heat Transfer TANG Yong, PAN Min–qiang, TANG Xing–Xian (School of Mechanical and Automotive Engineering, South China University of Technology, Guangzhou 510640) Abstract: Functional surface structures for heat transfer refers to the structures with different morphology, scales and dimensions processing on a solid surface for heat transfer. The complex functional surface structures have wide application prospects on the thermal control of highly–integrated chip. How to actively design the functional surface structures according to heat requirements and propose suitable high–efficiency low–cost manufacture method is the key issue for solving the problem of high heat flux. Based on analyzing the research on present state of functional surface structures for heat transfer, the key manufacture techniques of functional surface structures are discussed in detail. Furthermore, the priority research areas for the future study of functional surface structures are brought forward, which aim to the micronization and c