采取三向光纤照明成像的三维微结构观测系统.pdfVIP

12 3 Vol. 12 No. 3 2004 6 Optics and Precision Engineering Jun. 2004 1004924X(2004) 0302 50 张 麟, 陈 涛, 刘世炳, 左铁钏 ( 北京工业大学 激光工程研究院激光微技术实验室, 北京100022) : , , D/ A , , , , , CCD , , , , , 0. 001 5m, 1 m, CCD : 微电机械系统; 照明; 电荷耦合器件; 显微测量; 标定误差 :TH 03 :A Observation and measurement system for microstructure based on threedirection fiber illumination ZHANG Lin, CHEN Tao, LIU Shibing, ZUO Tiechuan (Bejiing University of Technology, Beij ing 100022, China) Abstract: This paper introduces a new three direction illumination system with light intensity, angle of incidence and distance of incidence precisely realtime regulated is proposed for observation of 3D microstructure of MEMS. Threedimensional images and the surface of the microstructure can be achieved by using this system. In the process of designing the surface matrix CCD micromeasurement system, calibration errors have a direct effect on the mea surement accuracy of the system. A new method, which is simpler, faster, more convenient and more applicable than the traditional method, is proposed to calibrate and reduce calibration errors. The calibration accuracy of the system is up to 0. 001 5 m and its measurement accuracy is upto 1m. This system is suitable for calibration at the level of micron. Key words: MEMS; illumination; chargecoupled device; micro measurement; calibration error : : :(501 5002) , 863( 2002AA404160) , ( 3031001) 2 6 12 , , , 1 引 言 / ,