材料化学-纳米材料4.pdfVIP

Scanning Probe Microscope (SPM) Lithography Or Scanning Probe Lithography (SPL) A Scanning Probe Microscope tip, such as an Atomic Force Microscope (AFM) or Scanning Tunneling Microscope (STM) tip, is used to locally modify a surface, much like a pen or knife Scanning Probe Lithography (SPL) • Mechanical scratching •Anodization of Si surface • Electrochemical decomposition of self-assembled monolayer • Electrofield induced chemical reaction • Electrochemical reaction in solution using protected STM tips •Optical