射线多层膜设计中表面粗糙度对反射率的影响.pdfVIP

第 12 卷 　第 4 期 　 光学 精密工程 Vol . 12 　No . 4 2004 年 8 月 　　 　　　　　　　　 　　Optics and Precision Engineering 　　　　　　　　　　 Aug. 2004 ( ) Articlre ID 　1004924X 2004 Roughness effects on the reflectance in the design of a soft Xray multilayer mirror 1 2 HU J iasheng ,SON G Limin ( 1. S chool of Elect ronic an d I nf or m at ion E ng i neeri ng , D al ian Univ . of Tech . , D al ian 116024 , Chi na ; 2 . S chool of Elect ronic an d I nf or m at ion E ng i neeri ng , D al ian M arit i m e Univ . , D al ian 116026 , Chi na) λ Abstract : In t he design of a multilayer mirror at = 1. 03 nm in soft Xray regin , a modified met hod is p resented , in which t he effect s of rootmeansquare (rms) roughness of t he subst rate and interfaces between t hese films on t he reflect ance are considered and discussed . Then , t he mat hematical model for rough inter faces is given based on t he scattering t heory p resented by D . G. Stearns. The design result show s t hat t he subst rate roughness (rms) should be smaller t han 0 . 6 nm in or der to fabricate a multilayer mirror who se reflect ance is greater t han 10 %. A few superpolished fused quartz subst rates wit h 0 . 5 nm (rms) rough λ ness are cho sen in coating experiment s. The measured reflect ance is about 10 % at = 1. 03 nm ,which is consistent wit h t he result acquired by t he modified design met hod . The multilayer mirror has been applied in a Xray spect rograp h for diagno sis of inertia