真空材料放气率测试实研究.pdfVIP

中国真空学会质谱分析和检漏专业委员会第十七届年会 中国计量测试学会真空计量专业委员会第十二届年会 真空材料放气率测试实验研究 董猛 冯焱 李得天 成永军 马奔 王永军 （兰州空间技术物理研究所，甘肃兰州 730000 ） 摘要：真空材料放气率测试装置由抽气系统、双通道气路转换法测量系统、小孔流导气体流量 法测量系统、静态定容升压法测量系统、加热及光辐照温度测控系统等五部分组成。使用分子泵和 -9 机械泵串联抽气的方式使测试装置的极限真空度达到了 10 Pa，温度测控范围为23℃~300 ℃，分别 介绍了静态定容升压法、小孔流导气体流量法和双通道气路转换法的测试原理及方法，并对铜金属 等几种真空材料在室温和不同温度下的放气率进行了测试。 关键词：材料放气率 双通道气路转换法 小孔流导气体流量法 静态定容升压法 测试装置 Characteristics of Measurement Apparatus for Vacuum Material Outgassing Rates Meng Dong, Yan Feng, Detian Li, Yongjun Cheng, Ben Ma, Yongjun Wang (Lanzhou Institute of Physics, Lanzhou 730000, China) Abstract: A measurement apparatus for vacuum material outgassing rates was developed, which is mainly composed of five systems: pumping system, switching between two pumping paths(SPP) measurement system, orifice throughput measurement system, constant volume measurement system, bake -9 heating and light irradiation heating system. The ultimate pressure, 10 Pa, was thus obtained in the UHV chamber by combining the magnetically levitated turbomolecular pump with mechanical pump. The temperature measurement and control rang is (23~300)℃.The test principles of the three methods were described, and several vacuum materials outgassing rates such as copper was tested at room temperature and different temperatures. Key words: vacuum material outgassing rates; SPP method; the orifice throughput method; the constant volume method; measurement apparatus. 1 概述 任何固体材料在大气环境下都能溶解、吸附一些气体。当材料置于真空中时就会因解溶、解吸 [1] 而放气 。真空材料放气率的研究在卫星、飞船和空间站污染防护、原子钟的研制、极高真空获得 和测量、光源和热源制造业等方面的研究中具有广泛的应用价值。 材料是组成航天器的最基本单元，材料放气往往会带来一些负面作用，对材料在真空环境中的 放气率进行准确测量，可以为航天器件材料的筛选提供科学依据，以保证材料在真空环境下应用的 可靠