UV_LIGA技术制备微型柔性镍接触探针.pdfVIP

15 5 V ol . 15 N o. 5 2007 5 O pt ics and Precision Eng ineering M ay 2007 1004924X( 2007 0507 3506 UVLIGA 1, 2 2 2 2 明平美 , 朱 荻 , 胡洋洋 , 曾永彬 ( 1. 河南理工大学机械与动力工程学院, 河南焦作454000; 2. 南京航空航天大学, 江苏 南京2100 16 : , U VL IGA , , , , : U VLIG A , 60 , 120 min, 90 , 120 min ; ; 65 , 10 min , 95 , 4 5 min; , ( 4 mm , 80 m , 100 m ; 5( 100 m : 20 m ; 5 m ; , : U VL IGA ; 柔性接触探针; SU8 胶; 光刻; 电铸 : T N305 . 7 : A Fabrication of nickel soft contact microprobe based on UVLIGA 1, 2 2 2 2 M IN G Pingmei , Z H U Di , H U Yangyang , ZEN G Y ongbin ( 1. School of Mechanical and Power Eng ineering, H enan Polytechnic University , Jiaozuo 454000, China; 2. anj ing University of A eronautics A stronautics, anj ing 2100 16, China) Abstract: F abricat ion m et hod and it s key process po int s o f t he m icro probes u sed in ICs or semicon duct ors w ere analyz ed . T he processes of nickel so ft cont act microprobes produced by UVL IGA w ere int roduced. By analyzing on it s f abricat ing key s and opt im izing t he exper im ent al pro cess paramet ers of som e key f abricat ion step s, a kind of nickel so ft cont act microprobe w as f abr icated. T he experiment al result s show t hat nickel so ft co nt act microprobe has t ot al leng t h o f 4 m m, w idt h of 80 m, and height of 100 m. Radius of curvat ure o f t he t ip is less t han 5 m and t he highto w ide ratio ( 100 m 20 m of spring is 5 . T he m icro probes w it h appropriat e dim ensional accuracy, g ood appearance quality and less dr aw backs can be f abricat ed relat ively econom ically based on the opt im ized proces