微纳米加工技术及应用综述.pdfVIP

* 崔 铮 , . , . , . , . , , , Overview ofm icro/nanofabrication technologies and applications CUI Zheng Rutherf ordApp leton Laboratory, CentralM icrostructureFacility Chilton, Didco,t Oxon Ox 11 0QX, U Abstract It has been revealed that materials and structures on the m icro and nanom eter scale demonstrate m an characteristics different from their m acro dmi ensions. Nanotechnolog has become