ECR-PLA的激发增强和ECR-PLA中的气相反应.pdfVIP

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ECR-PLA的激发增强和ECR-PLA中的气相反应.pdf

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指导小组成员名单吴嘉达教授孙剑副教授许宁教授应质峰副教授目录摘要 ···································································································… … 1 A b str a c t .，·，‘‘，···… … ，，·，·····… … ，.，········. ·... ·········. ··. ··. ···········… … 。···············… … 3 第一章前言 ·······················································································，··… …4 1.1 脉冲激光烧蚀和脉冲激光等离子体 ······················································… …4 1.2 E C R 微波放电和 E C R 等离子体 ···················································，········… …7 1.3 E C R 一PLA 等离子体 ·········································································..… …8 1.4 光发射谱测量 ·················································································… …9 1.5 论文内容概述 ·················································································… … 11 第二章实验装置介绍 ·································································· ····.·…… 12 2 .1 脉冲激光烧蚀装置 ···········································································… … 12 2.2 E C R 等离子体源 ·············································································。… … 13 2 .3 时空分辨光谱测量装置 ·····································································… … 14 第三章 E C R 氮等离子体对 P L A 等离子体的作用 ·············································……16 3 .1 真空和氮气中的 P L A 等离子体 ························································，… … 16 3.1.1 真空和氮气中的 P LA 铝等离子体 ················································… … 17 3.1.2 真空和氮气中的 P LA 碳等离子体 ···············································，