薄膜声表面波器件的制备研究进展.pdfVIP

27 2 Vol.27 No.2 2008 2 ELECTRONIC COMPONENTS AND MATERIALS Feb. 2008 TN65 A 100102-0008-02 Research progress in thin film surface acoustic wave devices WANG Rui, YANG Cheng-tao, ZHANG Shu-ren, LI Jiang-xiong (State Key Lab of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China,