硅微陀螺仪的机械耦合误差分析_施芹.pdfVIP

16 5 V ol . 16 N o. 5 2008 5 O pt ics and Precision Eng ineering M ay 2008 1004-924X 200 8) 05- 0894- 05 施 芹, 裘安萍, 苏 岩, 朱欣华 南京理工大学机械工程学院, 江苏 南京210094) : z , , , , z , , , , z 342. 59 / s, , : 硅微陀螺仪; 机械耦合误差; 正交耦合误差 : V 24 1. 5 : A Mechanical coupling error of silicon microgyroscope SH I Q in , QIU A n- ping, SU Y an , Z H U Xin- hua ( Sc hool of M echanical E ng i ne er ing , N anj ing Un iv er si ty of Scienc e T ec hnology , N anj i ng 210094, Chi na) Abstract: T he m echanism of mechanical coupling error s o f silicon m icrog yro scopes w as studied. Fo r a imperf ect m achining , t he erro rs cau sed by t he aniso elasticit y, asy mmet rical damping and t he unbal- anced m ass o f a t ype of z- axis silicon microgy roscope w ere analysed based on the dy namic equat io ns and mat rix t heor y. T he mat hem at ic mo dels of mechanical coupling errors w ere put forw ard , and the numerical result s of mechanical coupling erro rs w ere g iven. A nalysed results show t hat t he mechanical coupling errors consist of err ors in- phase w it h t he useful sig nals and quadr at ure err ors, and quadra- t ure er rors ar e t he larg est one, w hich come f rom t he asym metrical damping. F inally, the t est results show t hat t he quadrature erro r of a z- ax is silicon m icrog yrscope is 342. 59 / s , w hich is in acco rdance w it h t he analyt ic result s. It sugg ests t hat rest raining and com pensating quadr at ure er rors is one of the key t echnol ogies to decrease mechanical coupling erro rs. Key words: silicon microg yrosco pes; mechanical coupling erro r; quadrature coupling err or : 2007- 10- 08; : 2007- 11- 0