mems微悬臂梁可靠性研究现状.docVIP

MEMS微悬臂梁可靠性研究现状 论文 关键词：MEMS　微悬臂梁　可靠度论文摘要： MEMS(Micro-electronics Mechanical System)的可靠性已经成为它能否成功地实现产品化的一个重要问题。多晶硅微悬臂梁是MEMS中的一个基本结构，作为机电结合的元件，在MEMS中具有不可替代的位置。本文就近年来国内外所开展的有关多晶硅微悬臂梁的在多种失效机理下可靠性研究情况进行了综述，并对今后这一领域的研究方向进行了展望。Key words: MEMS; micro-cantilever; reliabilityAbstract: The reliability of MEMS is a key problem for its commercial application. Poly—silicon micro—cantilevers is a basic structure, as a combination of mechanical and electrical components, place an irreplaceable part in MEMS. In this paper, at home and abroad in recent years carried out by the relevant silicon micro-cantilever