新型吸气薄膜的微观结构与性能研究.pdfVIP

（8）薄膜材料与表面技术 新型吸气薄膜的微观结构和性能研究 卜继国，毛昌辉，张艳，蔚秀英，杜军 （北京有色金属研究总院先进电子材料研究所，北京 100088） 摘 要：为了研究非蒸散型吸气薄膜的微观结构和吸气性能之间的关系，首次运用射频磁控溅射法制备出 Zr-Co-RE 系的非蒸散型吸气薄膜，靶材采用Zr-Co-RE 合金靶，运用冷场发射扫描电镜（SEM ）和原子力显 微镜（AFM ）揭示了吸气薄膜的微观形貌特征，采用X 射线衍射（XRD ）分析了晶态结构，运用全金属吸气 性能测试平台测试吸气薄膜的吸气性能。结果表明，Zr-Co-RE 吸气薄膜呈现柱状组织形态，表面为纳米级颗 粒堆积组成的三维粗糙形貌，含有大量晶界、孔隙及界面，沉积过程中的原子阴影效应和沉积原子低迁移率 是形成这种结构的主要原因；Zr-Co-RE 薄膜能在相对较低的温度下（300℃）实现完全激活；在相同激活条 -4 -2 件（300℃,30min）和氢气压强（2.7 ×10 Pa ）下，吸气薄膜吸气速率在1~100ml/(s ·cm ) 范围内变化，Zr-Co-RE 双层膜的吸气速率是单层膜的 10 倍，3 小时的累积吸气量是 80Pa ·ml/cm2 ；吸气薄膜的单位质量吸气量 4 3 （~10 Pa ·ml/g）明显大于传统块体吸气剂（~10 Pa ·ml/g），大活性比表面积和高扩散速率是薄膜吸气材料优 异吸气性能的根本原因. 关键词：材料学；非蒸散型吸气薄膜；磁控溅射法；吸气性能；锆-钴-稀土 Study of micro-structure and properties of innovative Non-evaporable getter films BU Jiguo, MAO Changhui, ZHANG Yan, WEI Xiuying, DU Jun (Advanced Electronic Materials Institute, General Research Institute for Nonferrous Metals, Beijing 100088) Abstract：In order to investigate the relationship between structures and sorption properties of getter films, Zr-Co-RE getter films were firstly fabricated by RF magnetron sputtering from an alloy target. Micromorphology of the films was observed by scanning electron microscope (SEM) and atomic force microscope (AFM). Crystalline state was analyzed by X-ray diffraction (XRD). Sorption properties were tested by metallic measurement p latform for gas sorption. The results showed that Zr-Co-RE getter films developed the columnar-like structure and three-dimensional rough surface due to atomic shadowing effect and low mo