化学气相沉积法合成纳米碳管阵列研究.kdh.pdfVIP

·24 · 袁 霞等，化学气相沉积法合成纳米碳管阵列研究 Vol． 31． No． 2 ，2009 化学气相沉积法合成纳米碳管阵列研究* 袁 霞，刘艳秋，牛治群， 安玉良** （沈阳理工大学材料科学与工程学院，辽宁沈阳110168） 摘要：研究以环己烷为前驱体采用化学气相沉积法制备纳米碳管阵列。将催化剂二茂铁定量溶解在环己烷中，通过载气夹 带进入反应器中，采用化学气相沉积方法定向生长出炭纳米管阵列，此法有效地控制反应体系中的催化剂含量，使生产稳定性 及重现性较好。并通过透射电子显微镜、扫描电子显微镜、拉曼光谱及X 射线衍射对产品形态和结构进行分析和表征，所制备 出的纳米碳管阵列形态比较规整，纯度较高，具有较好的石墨微晶结构；并对纳米碳管的生长机理进行了详细讨论。 关键词：碳纳米管；化学气相沉积（CVD）；环己烷；催化剂 中图分类号：TQ 710.6 文献标识码：A 文章编号：1001－0017 （2009）02 －0024- 04 Synthesis of Carbon Nanotubes Array by Chemical Vapor Deposition Method YUAN Xia, LIU Yan-qiu, NIU Zhi-qun and AN Yu-liang （College of Material Science and Engineering, Shengyang Ligong University, Shenyang 110168, China） Abstract: Carbon nanotubes arrays were synthesized by CVD method using C H as carbon source precursor. Carbon nanotubes array was 6 12 directly grown on substrate using ferrocene as catalyst precursor. Better production stability and reproducibility could be obtained by regulating the content of catalyst in C H solution. The products were analyzed and characterized by XRD (X -ray diffraction), TEM (Transmission electron 6 12 microscope), Raman spectrum and SEM (Scanning electron microscope), and it showed an ideal structure and morphology with high purity. The growth mechanism of the carbon nanotubes was also discussed in detail. Key words: Carbon nanotubes; CVD; hexamethylene; catalyst [ 10 ] [ 11 ] 挥发的有机溶剂如苯 、乙醇 等，此外还有其他 前 言