激光外差干涉快速超精密测量模型研究_钟志.pdfVIP

25 6 V l. 25, N . 6 2005 6 A CT A OPT ICA SINICA June, 2005 : 0253-2239( 2005) 06-79 1-4 激光外差干涉快速超精密测量模型研究* * * 钟 志 谭久彬 马洪文 孙文法 ( , 150001) : , , , , , , , 2 v / c , , 1 m/ s, 3 m , 18 nm, , : ; ; ; ; : T N247 : A Study on Fast Ultra-Precision Measurement Model in L aser Heterodyne Interferometry Zhong Zhi Tan Jiubin Ma Hongwen Sun Wenfa ( Instit ute f Ultra-Precisi n Opt electr n ic In stru m en t En gineering , Harbin Instit ute f T echn l gy , Harbin 150001) Abstract: In order to describe accurately laser heterodyne interferometer measurement in fast ultra-precision, a new model is proposed. The laser heterodyne interferometer measurement theory is analy ed, and laser interferometer fast ultra-precision model based on the Doppler frequency shift model is deduced. In the model, the 2 integral of v / c is added, the part is ignored in laser heterodyne interferometer conventional model. With this model, when the highest measurement speed is up to 1 m/ s and the displacement is up to 3 m, about 18 nm of measurement error is reduced, and the residual error is removed, the fast ultra-precision measurement is reali ed. Key words: optical measurement; laser interferometry; fast ultra-precision measurement model; Doppler frequency shift; residual error 1 , , ZYGO Demarest F [ 1] ZM I2000 2. 1 m/ s, , 0. 31 nm[ 6] [ 2~ 4] , , , , B. S , [ 7 , 8] Scir cc