毕业设计（论文）-双光栅干涉表面轮廓测量传感器.docVIP

双光栅干涉表面轮廓测量传感器 摘 要 随着现代制造朝着高精密方向发展，满足一般实验和生产条件下的低成本、方便实用的高精密位移计量测试手段和测量传感器面临紧迫的需求。 本文中介绍了一种低成本、高精度的接触式微位移传感器。该装置由半导体激光器、双光栅干涉单元、干涉条纹光电接收与信号处理电路、计数细分与位移数显单元等组成。 首先，文中讲到了光栅干涉单元的选用，传感器所用激光器的介绍及由日本滨松公司生产的型号为S6695-01的四象限光电探测器介绍。紧接着讲述了由信号前置放大所得两路正交信号滤波、消除直流偏置和差分放大,及整形为方波信号的各部分电路的具体设计及GAL16V8进行四倍频细分和辨向处理,最后送到AT89C51单片机实现干涉条纹计数,并用共阴极七段数码管显示出计数值的具体电路设计及计量位移程序设计，并画出了相应的电气原理图和PCB板图。 在各部分分完成之后进行程序的软件模拟调试及全文总结。 关键词：双光栅干涉，高精度，四象限光电探测器，四倍频细分 DOUBLE GRATING INTERFEROMETER SENSOR FOR SURFACE PROFILE MEASUREMENT ABSTRACT With the development of modern manufacturing, high precision measuring and displacement sensor is used more urgently which is low-cost and convenient in normal experiment and production conditions. This paper introduces a low-cost, high-precision micro-displacement sensor contacts. The sensor is made up of semiconductor laser, double grating interference cell, photoelectric receiver, the signal processing circuit and so on. Firstly, this paper specifically introduces double grating interferometer units, the laser used in sensor and the four-quadrant optoelectronic detector produced by the Japanese company Hamamatsu model S6695-01. secondly，I explain the specific design of each part of the circuit，including, the signal filtering about the two orthogonal signal from preamplifier circuit, eliminating DC bias and differential amplification, shaping for the square wave signal, using GAL16V8 for four sub-frequency and identifying the direction, sending the square wave signal to the MCU AT89C51 to count, and using the common cathode seven segment LED to display the count. At last I need to write the program of measuring displacement and draw electrical schematics and PCB boards. Software simulation test of the programs and summary of full paper are carried out after the completion of each part of the design. KEY WORDS: Double grating interference，high-precision，Four-quadrant optoelectronic detector，Fourth harmonic subdivision 目　录 前　言 1 第1章 双光栅干涉表面