磁激励RF_PECVD法低温制备类金刚石薄膜及其特性.pdfVIP

! 21 9 20 10 9 Journal of Optoelectronics !Laser V ol. 21 N o. 9 Sep. 20 10 * * 磁激励RFPECVD法低温制备类金刚石薄膜及其特性 * * 肖 琦, 杨保和 , 朱珊珊 ( , 300384) : ( MRFPECVD) , Si( 100) ( DLC) , ( SEM) ( FT IR) Raman , 30 Pa50 WCH4 / A = 5/ 9040 ,DLC , , sp 3 : ; ( RFPECVD) ; ; ( DLC) ; ( SAW) ; : O484 : A : 2010) Characterization of DLCfilms prepared by magnetoactiveRF PECVDmethod in lowtemperature * * XIAO Qi, YANG Baohe , ZHU Shanshan ( T ianj in Key Labo ato y of Film Elect onic and Communication Devices, T ianjin U nive sity of Technolog y , T ianjin 300191, China) bstract: Diamondlike ca bon films a e fab icated espectively on glass subst ates and Si ( 100) sub st ates in low tempe atu e by M agnetoactive Radio F equency Plasma Enhanced Chemical Vapo Deposition( MRFPECVD) method. The film cha acte ist ics a e investigated by using Fou ie t ansfo m inf a ed( FT IR) spect oscopy, Raman spect oscopy and scanning elect on mic oscope( SEM) , espective ly. The esult s show that hyd ogenated ca bon films p epa ed at pow e of 50 W, p essu e of 30 Pa, and CH / A atio of 5/ 90, have a smooth su face and a e composited by sp 3 amo phous ca bon mostly. 4 Key words: magnetoactive; adio f equencyplasma enhanced chemical vapo deposition ( RFPECVD) ; low tempe atu e; diamondlike ca bon( DLC) ; su fac acoustic w ave( SAW) ; gas senso ( m ) , DLC , 1 ,