专题讲座：英文 CMOS工艺流程.pdfVIP

Basic CMOS Process Flow 1. Shallow Trench Formation 2. Well Formation 3. Gate Formation 4. Source/Drain Formation 5. Silicide Formation 6. 1st Interconnect Layer 7. 2nd through Nth Interconnect Layer 8. Passivation 1 - Silicon Epi Layer P Basic CMOS Process Flow