晶体生长计算软件FEMAG系列之晶体生长各种方法.ppt

晶体生长计算软件FEMAG 之 晶体生长方法汇编 Bulk Crystals Materials FEMAGSoft ? 2010 Whole industries rely on bulk-grown crystals of a variety of materials Silcion/Germanium for semiconductor and solar industry III-V compunds (GaAs Inp InSb SiC GaN etc) for telecommication, LED, defense and solar industry HgCdTe for infrared imaging Fluoride/Halide/oxide scintillator crystals for high-energy physics, medical imaging and optical industries etc. Bulk Crystal Growth Methods FEMAGSoft ? 2010 Czochralski (CZ) Floating Zone (FZ) Directional Solidification (DSS) Vertical/Horizontal Bridgman (VB) Vertical Gradient freeze (VGF) Physical Vapor Transport (PVT) Silicon Crystal Growth Method FEMAGSoft ? 2010 String Ribbon (Patented by EVERGREEN) EFG Hotzone importance FEMAGSoft ? 2010 The key important thing for all growth processes is the Hotzone and associated operating condtions, which control the major characterstics of crystals, and the structure of the hotzone and associated operating conditions are the major know-how of each IC wafer manufacturers. Czochralski Growth Method FEMAGSoft ? 2010 FEMAGSoft ? 2006 Czochralski Growth Method FEMAGSoft ? 2010 FEMAGSoft ? 2006 Czochralski Method Around 90% single crystal grown by Cz method in IC industry Part of Germanium crystal grown by CZ method Sappher and lots Compound crystal grown by CZ or its variants, such as Kyropoulos, LEC etc. Market share of CZ wafer in solar market slightly lower than DSS mc wafer Czochralski Growth Method FEMAGSoft ? 2010 FEMAGSoft ? 2006 Hot topics once in IC industry, and currently hot topics for solar: all about growth yield, and then quality improvement CCZ with multi-melt partitions MCZ Growth rate improvement Impurity control (oxygen, carbon) and dopants microvoids and dislocations on cell efficiency Czochralski Growth Method (MCZ) FEMAGSoft ? 2010 FEMAGSoft ? 2006 Cost reduction is limited with respected to the equipments/consumables modifications Innotative efforts are required to further be impro