中频磁控溅射制备AlN薄膜.pdfVIP

32 3 Vol. 32, No.3 2009 3 NUCLEAR TECHNIQUES March 2009 AlN 430072 Si(111)AlN X AlN AlN (002)612–648 AlN O484.1, O47 3 AlN (2 ×10 kg·f·mm–2)(285 W·m·K–1) –6/K) (5.9–6.2 eV)(4×10 (5607 km/s) AlN