复合工艺制备TiAlN薄膜及其高温抗氧化性能研究.pdfVIP

22 T iA lN TiAlN 1 2 1, 3 , , ( 1. , 350007; 2. , 710064; 3. , 350001) [ ] 采用T i 靶电弧离子镀与Al 靶中频磁控溅射相结合的复合工艺, 通过调节Al 靶电流, 在不锈钢 体上制备了TiN 薄膜和TiAlN 薄膜样品, 并在热处理炉内对薄膜进行高温抗氧化试验, 分析了薄膜氧化前后 的表面形貌断口形貌及显微硬度结果表明: TiAlN 薄膜氧化前和氧化后的硬度均随着铝靶磁控溅射电流的增 强铝含量的提高而增加; T iAlN 薄膜的高温稳定性明显优于TiN 薄膜; T iA lN 薄膜经800 氧化后发生膨胀而 变得疏松, 内部发生了柱状晶化, 致密性下降 [ ] T iAlN 薄膜; T iN 薄膜; 抗高温氧化性能; 中频磁控溅射; 电弧离子镀 [ ] T G 174. 444 [ ] A [ ] 2010) Study on TiAlN Films Deposited by Composite Technology andIts Thermal Antioxidation Property LI N Xi aod ong 1, SONG X ud ing 2 , F U Gaosheng 1, 3 ( 1. Fujian Communi ation Te hnology College, Fujian 35007, China; 2. Constru tion Ma hinery S hool, Changan University, Xian 710064, China; 3. The ollege of Me hani al Engineering, Fuzhou U niversity, Fujian 350001, China) [Abstract] T he T iAlN and T iN films deposited on polished fa e of stainless steel by ar ion plating ompounded with intermediate frequen y unbalan ed magnetron sputtering w ere oxidized at different temperature in heat treatment furna e. T he investigation of mi rostru tion, rystalline stru ture and mi rohardness after oxidant films was arried out. T he experiment results show that the hardness of T iAlN f ilms before and after oxidation in reases w ith the enhan e of Al target ele tri urrent density and the in rease of Al ontent ; T he high temperature stability of T iAlN films superi or to T iN films; T he T iAlN films be ome expansion after 800 ox idation. T his will de rease the ompa tness of T iAlN films. [Key ords] T iAlN films; T iN f ilms; thermal antiox idation property; intermediate frequen y unbalan ed magne tron sputtering; ar