PC树脂上沉积DLC薄膜耐磨性与透光性的研究.pdfVIP

39 4 2010 8 1 Vol. 39 No. 4 Aug. 2010 SURFACE TECHNOLOGY 试验研究 PCDLC , , , , , , ( , 100871) [ ] 采用等离子体增强化学气相沉积( PECVD) 技术, 在聚碳酸酯( PC) 树脂片上沉积类金刚石( DLC) 薄膜, 获得耐磨性和透光性良好的光学镜片研究了薄膜的沉积工艺对PC 基体镀 DLC 薄膜耐磨性和透光性 的影响结果表明: PC 树脂片上沉积DLC 薄膜后, 耐磨性有极大的提高, 摩擦系数降低了70% 左右, 显微硬度增 加了约30% 且随着沉积时间增加而增加, 但透光率由约90% 降至80% ~ 70% 薄膜样品的耐磨性和透光性与样 品的粗糙度形貌及组成有关 [ ] PC 树脂; DLC 薄膜; PECVD; 耐磨性; 透光性 [ ] T G 174. 42 [ ] A [ ] 2010) 04000 104 Abr sion Resist nce nd Tr nsmitt nce of DLC Films Deposited on PC Resin CH U Yi ng , CHEN G Yan, ZHEN G Yuf eng , ZHO U Yi, WAN G Yanbo, X ION G Xia ol ing, WEI Shicheng ( Acad my for Advanc d Int rdisciplinary Studi s, P king U niv rsity , B ijing 100871, China) [Abstr ct] Diamondlik carbon ( DL C) f ilms with good abrasion r sistanc and high transmittanc w r d posit d on polycarbonat ( PC) by plasma nhanc d ch mical vapor d position ( PECV D) . T h ff cts of t chnological param t rs on prop rti s w r inv stigat d. T h r sults show that th abrasion r sistanc can b improv d gr atly aft r th DLC film d posit d on th PC r sin. T h friction co ff ici nt has a d cr as of 70% . T h microhardn ss has an incr as of about 30% and incr as s with th incr as of d posit d tim . T h transmittanc has b n r duc d about from 90% to 80% ~ 70% . T h abrasion r sistanc and transmittanc of film hav clos r lation to th roughn ss, app aranc and ingr di nt. [Key words] PC r sin; DLC film; PECV D; abrasion r sistanc ; transmittanc ( Polycar bonat , PC) ( 0. 2 ) , PC ( 1. 7~ 2. 6) , ( ) [ 1] , , , ,