FEMAG晶体生长仿真软件晶体中氧浓度和各组分浓度预测.pptVIP

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FEMAG晶体生长仿真软件晶体中氧浓度和各组分浓度预测.ppt

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FEMAG晶体生长仿真软件晶体中氧浓度和各组分浓度预测

FEMAGSoft ? 2013 FEMAG晶体生长仿真软件FEMAG Prediction of Oxygen and Species Concentrations in the Crystal 3. Species transport FEMAGSoft ? 2013 Crucible radius = 0.1 m Crystal radius = 0.05 m Crystal rotation rate = -16 rpm Crucible rotation rate = 8 rpm Pulling rate = 1 mm/min Limited Mixing Length turbulence model Calculation of oxygen and boron concentration in a growing 100 mm silicon crystal Species transport (cont’d) FEMAGSoft ? 2013 Temperature field in the melt and crystal Streamlines in the melt Marangoni convection is taken into account Mirror boundary conditions are applied at the melt surface Different color ranges are used in crystal and melt Species transport (cont’d) FEMAGSoft ? 2013 Streamlines in the melt Oxygen concentration in the melt and crystal Marangoni convection is taken into account Mirror boundary conditions are applied at the melt surface Different color ranges are used in crystal and melt Species transport (cont’d) FEMAGSoft ? 2013 Streamlines in the melt Boron concentration in the melt and crystal Marangoni convection is taken into account Mirror boundary conditions are applied at the melt surface Different color ranges are used in crystal and melt Species transport (cont’d) FEMAGSoft ? 2013 Magnetic field intensity = 0.3 T Pulling rate = 0.3 mm/min Crucible radius = 0.032 m Crystal radius = 0.016 m Crystal rotation rate = 0 rpm Crucible rotation rate = 0 rpm Resulting oxygen concentration in the melt Quasi-steady prediction of oxygen concentration in a small CZ silicon furnace under the effect of a TMF Species transport (cont’d) * *