JPCM, Effects of the chemical bonding on the op tical and.pdfVIP

INSTITUTE OF PHYSICS PUBLISHING JOURNAL OF PHYSICS: CONDENSED MATTER J. Phys.: Condens. Matter 18 (2006) 4231–4241 doi:10.1088/0953-8984/18/17/011 Effects of the chemical bonding on the optical and mechanical properties for germanium carbide films used as antireflection and protection coating of ZnS windows 1 Chaoquan Hu, Weitao Zheng , Hongwei Tian, Le Xu and Qing Jiang Department of Materials Science and Key Laboratory of Automobile Materials of MOE, Jilin University, Changchun 130012, People’s Republic of China E-mail: WTZheng@jlu.edu.cn Received 6 March 2006 Published 13 April 2006 Online at stacks.iop.org/JPhysCM/18/4231 Abstract Germanium carbide (Ge C ) films have been prepared by RF reactive 1−x x sputtering a pure Ge(111) target at different flow rate ratios of CH4 /(CH4 + Ar) in a CH /Ar mixture discharge, and it has been found that the composition, 4 chemical bonding, optical and mechanical properties of Ge1−x Cx films are remarkably influenced by the flow rate ratio of CH4 /(CH4 + Ar). The effects of the chemical bonding on the optical and mechanical properties of the Ge1−x Cx films have been explored. In addition, an antireflection Ge1−x Cx double-layer coating deposited on both sides of the ZnS substrate wafer has been developed for application as an infrared window. It is shown that the transmittance in the wavelength region between 8 and 12 µm and