Microstructure and corrosion resistance of nanocrystalline.pdfVIP

Microstructure and corrosion resistance of nanocrystalline TiZrN films on AISI 304 stainless steel substrate Yu-Wei Lina Instrument Technology Research Center, 20 RD Road VI, Hsinchu Science-Based Industrial Park, Hsinchu 300, Taiwan, Republic of China and Department of Engineering and System Science, National Tsing Hua University, 101 Kuang Fu Rd., Sec. 2, Hsinchu 300, Taiwan, Republic of China Jia-Hong Huang Department of Engineering and System Science, National Tsing Hua University, 101 Kuang Fu Rd., Sec. 2, Hsinchu 300, Taiwan, Republic of China Ge-Ping Yu Department of Engineering and System Science, National Tsing Hua University, 101 Kuang Fu Rd., Sec. 2, Hsinchu 300, Taiwan, Republic of China and Institute of Nuclear Engineering and Science, National Tsing Hua University, 101 Kuang Fu Rd., Sec. 2, Hsinchu 300, Taiwan, Republic of China Received 15 October 2009; accepted 11 January 2010; published 29 June 2010 This study investigated the microstructure and properties of nanocrystalline TiZrN films on AISI 304 stainless steel substrate. TiZrN films were prepared by reactive magnetron sputtering based on the previous optimum coating conditions substrate temperature, system pressure, nitrogen flow, etc. for TiN and ZrN thin films. The composition ratio of TiZrN coatings were adjusted by changing the Zr target power, while keeping the Ti target power constant. Experiments were conduced to find the optimum composition with desired properties. The ratio of TiZrN composition was analyzed by x-ray photoelectron spectroscopy and Rutherford backscattering spectrometer. In terms of phase formation, there were two types of coatings that were considered: single-phase solid solutions of TiZrN and interlacing nuclei of TiZr in th