3.16 - Micro-Coolers.pdfVIP

3.16 Micro-Coolers Junghoon Yeom and Mark A. Shannon, Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL, USA a 2008 Elsevier B.V. All rights reserved. 3.16.1 Introduction 500 Applications of Microcoolers 501 .1 Electronics cooling 501 .2 Microclimate cooling 502 .3 Drinking water cooler 502 3.16.2 Challenges Related to Microcooling Technologies 503 3.16.3 Microcooling Technologies with Related Principles 505 Air Cooling 505 .1 Microfans 505 .2 Piezoelectric fans 506 .3 Microjet cooling 507 Liquid Cooling 510 .1 Passive two-phase heat spreaders 510 .2 Liquid impinging jet and spray cooling 521 .3 Microchannel heat exchangers 524 Solid-State Cooling 528 .1 Thermoelectric microcoolers 528 .2 Thermionic microcoolers 532 Mechanical Refrigeration Methods 534 .1 Active two-phase cooling systems 535 .2 Vapor compression refrigerators 535 .3 Stirling refrigerators 538 .4 Joule–Thompson refrigerators 538 .5 Brayton gas refrigerators 539 .6 Sorption refrigerators 539 3.16.4 Integration of other MEMS Devices into Microcoolers 540 Micropumps 540 Microvalves 540 Integrated MEMS Sensors 540 3.16.5 Nanotechnology in Microcoolers 541 3.16.6 Summary and Conclusions 541 References 542 Nomenclature Leff effective length between the evaporator A surface area where heat transfer occurs and the condenser in an MHP A eff cross-sectional area of an MHP q heat flux removed A surf project geometrical area where boiling qCHF critical heat flux – maximum heat flux in the occurs nucleate boiling regime cp intensive heat capacity or specific heat Rth effective thermal resistance d fan diameter S Seebeck coefficient h overall heat transfer coefficient T absolute temperature hboil boiling heat transfer coefficient D T temperature difference between the sur- keff effective thermal conductivity of an MHP face to be cooled and the ambient 499 500 Micro-Coolers D Tsat wall superheat ?TwallTsat rcp mass specific capacity ZT n