原创力文档- 16
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- 约7.75万字
- 约 71页
- 2015-10-24 发布于贵州
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薄膜晶体管备技术研究
Abstract
Thinfilmtransistor
isa tothe flat master
key high—resolution
paneldisplay．To
the
fabrication ofthis istofabricate TFTwith
technology,thetarget paper practical
existed andtestwork
equipments．The ofTFThavebeendone．
depositionprocess
Bottomstructurea-Si：HTFT was
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