SnO_2复合薄膜甲烷气敏传感器及研究进展_李建昌.pdfVIP

30 　 6 　　　　　　　　 　　　　　　　 　　　　　　　　　　　 2010 11、12 CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY 641 　 SnO2 ＊ 李建昌 　韩小波　韩　娜　巴德纯 (　　110004) Latest Development of Methane Sensors Made of SnO Composite Films 2 ＊ Li Jianchang ,Han Xiaobo,Han Na,Ba Dechun (Vacuum and F luid E ngineering Research Center, School of Mechanical Engineering and Automation, Northeastern University , Shenyang 110004, China) 　　Abstract 　The latest development o the SnO2 composite ilm based methane gas sensor,which is gaining basic and technological interest because o global warming and coal mine sa ety issues,was tentatively discu ssed in a thought-pro- voking way .The discussions ocus on:a)Growth and sur ace modi ication technologies o a variety o gas sensing composite ilm materials,b )Design and abrication considerations o methane gas sensor and its possible structures,c)Characteriza- tion o microstructures and properties and the gas sensing mechanisms.The strengths and weaknesses o the SnO2 compos- ite ilms available were discussed as well .We propose:a)New metal oxide composite ilms be screened to improve the sensitivity ,selectivity and stability o the sensor,b )Sel -assembled metal-oxide semiconductor micro-arrays should be de- veloped to abricate miniaturized intelligent gas sensors, c)In-depth investigation o gas sensing mechanism should closely integrate with engineering practice . 　　Keywords　Methane,SnO ,Gas sensor,Metal-oxide-semiconducting thin ilms 2 　　　, 、, 。SnO2 、、, 。 , 、/、、 。、, SnO2 , :①, 、;② , ;③ 、。 　　　　 :TP212.2 　　　:A 　　　doi:10.3 6 /j.issn.1672-7126.2010.06.14 　　(CH )