添加剂PEG、Cl-、SPS作用下的铜电结晶过程的分析.pdfVIP

Master’s Degree Dissertation of Chongqing University Studies of the Copper Electrocrystallization in the Presence of PEG, Cl- and SPS Additives Master Candidate: LI Qiang Supervisor: Prof. GU Min Major: Safety Technology and Engineering College of Resources and Environmental Science Chongqing University October 2007 摘 要 利用铜代替铝作为集成电路的互连介质，代表了半导体工业的重要转变。采 用电沉积法实现铜在芯片上的高