Removal of oxides from copper surface using femtosecond and nanosecond pulsed lasers》.pdf

Applied Surface Science 349 (2015) 361–367 Contents lists available at ScienceDirect Applied Surface Science j o u r n a l h o m e p a g e: w w w. elsev /locate/aps usc Removal of oxides from copper surface using femtosecond and nanosecond pulsed lasers Changho Seo, Daehwan Ahn, Dongsik Kim ∗ Department of Mechanical Engineering, POSTECH, Pohang 790-784, Republic of Korea a r t i c l e i n f o a b s t r a c t Article history: We analyzed the process of using femtosecond and nanosecond pulsed lasers for removing the oxide Received 24 December 2014 layer from bulk copper and optimized the process parameters. A femtosecond laser (Ti:Sapphire) and Received in revised form 1 May 2015 two nanosecond lasers (Nd:YAG, excimer) were used to remove oxide layers composed of cupric oxide Accepted 1 May 2015 (CuO) and cuprous oxide (Cu O) from copper. Femtosecond laser ablation reduced the thickness of native 2 Available online 8 May 2015 oxide layers to <20 nm with no significant thermal side effects. Nanosecond laser ablation removed a substantial portion of the oxides but thermal side effects such as surface melting and resolidification Keywords: generated re-oxidation layers on the order of 100-nm thick. Laser ablation