SAW-based gas sensors with rf sputtered InOx and PECVD SiNx films Response to H2 and O3 gases》.pdfVIP

Sensors and Actuators B 118 (2006) 362–367 SAW-based gas sensors with rf sputtered InOx and PECVD SiNx films: Response to H2 and O3 gases A.C. Fechete a,∗, W. Wlodarski a , K. Kalantar-Zadeh a , A.S. Holland a , J. Antoszewski b , S. Kaciulis c , L. Pandolfi c a Sensor Technology Laboratory, School of Electrical Computer Engineering, RMIT University, GPO Box 2476V, Melbourne 3001, Vic., Australia