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Smart Cut Review on an attractive process for innovative substrate elaboration》.pdf
Nuclear Instruments and Methods in Physics Research B 277 (2012) 84–92
Contents lists available at SciVerse ScienceDirect
Nuclear Instruments and Methods in Physics Research B
journal homepage: www.else /locate/nimb
Smart Cut™: Review on an attractive process for innovative substrate elaboration
H. Moriceau a,⇑, F. Mazen a, C. Braley a, F. Rieutord b, A. Tauzin a, C. Deguet a
a CEA-LETI/Minatec Campus, F3805
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