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Sputter depth profiling of thin films with LEIS and LENRS》.pdf
180 Applied Surface Science 28 (1987) 180-186
North-Holland, Amsterdam
SPUTTER DEPTH PROFILING OF THIN FILMS
WITH LEIS AND LENRS
S.G. PURANIK and B.V. KING
Physics Department, University of Newcade, N.S. W. 2308 Australia
Received 28 July 1986; accepted for publication 22 November 1986
Low energy ion scattering spectroscopy (LEIS) and low energy negative recoil spectroscopy
(LENRS)
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