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Strained silicon on insulator (SSOI) by waferbonding》.pdf
ARTICLE IN PRESS
Materials Science in Semiconductor Processing 8 (2005) 197–202
Strained silicon on insulator (SSOI) by waferbonding
a, a a a a b
S.H. Christiansen , R. Singh , I. Radu , M. Reiche , U. Gosele , D. Webb ,¨
S. Bukaloc, B. Dietrichc
aMax-Planck-Institut Halle, Weinberg 2, D-06120 Halle, Germany
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