金属膜正温度系热敏材料的研究.pdf

摘 要 PTC 材料是一种温度敏感性的导电材料，PTC(Positive Temperature Coefficient) 即正温度系数，是指材料电阻率随自身温度升高而增大的一种特性。金属膜 PTC 热 敏材料与传统的陶瓷 PTC 材料相比，具有阻值极低、加热快速、安全系数高、工作 寿命长、无噪音、功率衰减小、机械强度高、密封性好及灵活性强等优点。金属膜 PTC 热敏材料可以用于感温加热器、温度传感器和红外探测器。 本文对金属膜设计和制备流程的各个环节进行了研究。选择镍和铁作为金属膜 材料，设计了金属膜的多层状结构，此结构能够增强膜的界面效应，同时使镍铁层 间形成合金层，从而对电阻温度系数的提升有重要作用。选择真空蒸发法制备镍铁 多层膜，利用金属熔点差，采取轮转蒸发源的方法实现了镍铁多层膜的制备，并用 烘箱、温度计、万用表和高温导线实现金属膜电阻温度系数测试过程。 本文对影响金属膜 PTC 效应的各个因素，包括层数、金属比例和热处理温度进 行了研究。当镍铁质量比为 7:3 时，镍层和铁层的厚度处于一个比较理想的范围，膜 样品的电阻温度系数较大，为 4928ppm/ ℃。400 ℃是一个比较理想的热处理温度，此 热处理条件下，镍铁质量比为 7:3 的膜样品的电阻温度系数较大。 综合各因素，镍铁比为 7:3 的十二层镍铁膜样品，在400 ℃热处理 120 分钟，升 温速率为 50℃/s，得到的金属膜的电阻温度系数有较高值，为 5582ppm/℃，室温电 阻为 301Ω，非线性误差较大，达到28.2% 。 关键词: 金属膜 电阻温度系数 PTC 真空蒸发 I Abstract Positive Temperature Coefficient (PTC) materials are temperature sensitive electric materials. The electric resistivity of the material goes up with the temperature increasing. Compared with traditional PTC ceramic materials, PTC metal film thermistor possesses many advantages such as extreme low resistance, fast heat up, high safety factor, long working life, no noise, little power attenuation, high mechanical strength, high flexibility and good sealing properties. PTC metal film thermistor can be used for thermal heaters, temperature sensors and infrared detector. In this paper, the design and preparation of the metal film has been studied. The nickel and iron were selected to be original material. A multilayer structure metal film has been schemed out. This structure enhanced the interface between the films and formed nickel-iron alloy layer, thus largely increasing the temperature coefficient of the resistance. The multilayer nickel iron film has been prepa