V型和Z型电热微驱动器性能比较与分析(邀请论文).pdfVIP

第41卷 第11期 北 京 工 业 大 学 学 报 Vol.41 No.11 2015年 11月 JOURNAL OF BEIJING UNIVERSITY OFTECHNOLOGY Nov. 2015 V型和Z型电热微驱动器性能比较与分析 (邀请论文) 1 2 张绪平 ,张摇 卓 (1.奥胡斯大学 工程学院和奥胡斯工程学院,奥胡斯摇 8000;2.北京工业大学 机械工程与应用电子技术学院,北京摇 100124) 摘摇 要:提出一种用于V型和Z型电热微驱动器性能比较的拓扑结构和标准,建立了在真空工作环境下V型和Z 型电热微驱动器系统分析与比较模型. 有限元仿真分析和实验结果验证了分析模型的准确性和有效性. 借助此分 析模型及所提出的性能比较拓扑结构和标准,综合分析和比较了V型和Z型电热微驱动器随不同结构参数变化时 输出位移和力性能,为V型和Z型电热微驱动器的合理选择、系统设计与分析提供了可靠和实用的指导. 关键词:电热驱动器;微驱动器;拓扑结构 中图分类号:TH122;TH112 文献标志码:A 文章编号:0254-0037(2015)11-1636-08 doi:10.11936/ bjutxb2015050109 Performance Comparison and Analysis of V- and Z-shaped Electrothermal Actuators (Invited Paper) 1 2 ZHANG Xu－ping ,ZHANGZhuo (1.Department of Engineering Aarhus University School of Engineering,Aarhus8000,Denmark; 2.College of Mechanical Engineering and Applied ElectronicsTechnology,Beijing University of Technology,Beijing 100124,China) Abstract: This paper presents a topological layout and benchmark that enables the systematic performance comparison between V－ and Z－shaped electrothermal micro－actuators. A common analytical model of both V－andZ－shapedmicro－actuatorsoperating invacuumconditionsisestablishedandverified by finite－element analysis and experimental results. Based on the analytical model and the proposed topological layout and benchmark,the performance of V－andZ－shaped actuatorsiscompared in termsof output displacement andforcewith varying structural parameters,which provides a reliable and pra