PocketMillingMachine.pptVIP

Pocket Milling Machine Ultra-high speed micro milling machine Motivation A means to build micro structures using conventional machining techniques Portable machine tool Applications - milling microfluidic circuits ranging from 50 microns and above with varied channel geometries in a varity of materials Functional Requirements Precision XYZ micro-manipulator Range : 20mm by 20 mm by 10mm Resolution : sub-micron (100nm) High stiffness in Z Close loop control High speed machine spindle (data point - a dentist drill runs at 300,000 rpm) Small “pocket” size Modules Strategies - XYZ stage Concept - Low profile compliant mechanism based Z stages Dobule loop bridge type hinge actuator Reported amplification = 30 Buckling sheet Z stage Low Z stiffness in the structure * * Micro-manipulation XYZ 3DOF Stage Focused-Ion beam milled micro tools, with specific geometries High speed spindle design for very high rpm Controls - end point close loop control 3 – axis Large stroke nm- resolution (100nm) Functional Requirements Hybrid Motion amp. Flexures, Piezos Parallel Motion amp. Flexures, Piezos Serial Large package Errors accumulate High inertia Parallel Coupled motion Control difficult Motion amp unreasonable size low stiffness Kinematics FEA Modal analysis Measured range - CMM Serial Motion amp. Flexures, Piezos Counter-measures Risks Analysis DP’s * * * Nano-manufacturing ; looking at scaling limits of milling process - chip needs to be much smaller than