INTERNATIONALANDNATIONWIDELOWTEMPERATUREPLASMASTUDIESANDAPPLICATIONSABRIEFREVIEW.docVIP

INTERNATIONAL AND NATIONWIDE LOW TEMPERATURE PLASMA STUDIES AND APPLICATIONS: A BRIEF REVIEW XIAOGANG WANG STATE KEY LAB OF MARTERIAL MODIFICATIONS BY BEAMS DALIAN UNIVERSITY OF TECHNOLOGY, DALIAN, CHINA 116024 Abstract This is a brief review for recent developments in low temperature plasmas science and technology. The relationship of low temperature plasma studies with high-tech industry is also discussed to provide a reference for future policy making. The major applications of low temperature plasma technology with emphasize on plasma sources and pulsed power techniques as well as further discussions of the dusty plasma application to plasma processing and biophysical applications are also presented. INTRODUCTION Low temperature plasma science and technology provide a strong base for high-tech industries such as computer chip manufacturing, material modifications and other plasma processing industries, as well as traditional industries such as the steel and electrical industries, and recently developed industries such as environment and space-aero industries, etc. The progresses of the area in the 80s and early 90s had been summarized by US National Research Council Panel on Plasma Processing of Materials [1]. We are here trying to review those new developments briefly. In this brief review, we first discuss the relationship of low temperature plasma studies with high-tech industry, in particularly the current situation in China in comparison with that in developed countries. Then we give a glance to the major applications of low temperature plasma technology with emphasize on plasma sources and pulsed power techniques. The further discussions of the applications are focused on the dusty plasma application to plasma processing and biophysical applications of low temperature plasma science and engineering. The review is concluded by a summary and further introduction to low temperature plasma research facilities in US universities. RELATIONSHIP WITH INDUSTRY Th