宏%2f微驱动高速高精度定位系统地研究.pdf

Classified Index ：TP242.2 U.D.C.: 681.532 Dissertation for the Doctoral Degree in Engineering RESEARCH ON THE HIGH-SPEED / HIGH-PRECISION POSITIONING SYSTEM OF MACRO/MICRO DRIVING Candidate ： Jie Degang Supervisor： Prof. Cai Hegao Assistant Supervisor ： Prof. Sun Lining Academic Degree Applied for ： Doctor of Engineering Specialty Mechatronics Engineering Affiliation ： School of Mechatronics Engineering Date of Defence ：