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ABSTRACT
Withthe ofscience
and roleandstatusofsensor
development technology,the technology
inthe
various ofthenational iS
departments economybecomingincreasinglyprominent.
BetweenalloftheMEMSsensors.the sensorwith
piezoresistivepressure highsensitivity,
gooddynamic miniaturizationand mass
response,highaccuracy,easy integration,and
characteristicsof themostmatureandtheearliestcommercializedsensoL
manufacturing。iS
It’S oneofthemost used currentdomeStic
sensor.However,the
currently widelypressure
situationof sensordetectioniS basedmanual
on detection.theiS
pressure mainly e筒ciency
erroriS levelof
automationiSnot backwardandinefficienttesthas
low,theeasy,the high.this
becomebethe factorsthat
to an on and
key havingimpactproductyieldquality.Therefore,
its tO a andefficientautomated for
necessarydeveloppractical batch-testingsystempressure
sensorto the of
improvee衢ciencyproducttesting.
Basedonvirtualinstrument sensor
technology,thepressure batch.testingsystem
an
of environmentaIsimulation data
consisting equipment.multi.channelacquisition
testsoftwarewas canbeusedtobatch ofthestatic
equipment,and developed.It testing
ofthe sensorinoneormore each
parameter
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