小孔自动测量仪及其应用技术地研究.pdf

ABSTRACT of isan anddifficult geometryparameter measuringimportant part Aperture externaland dimensionhas resolutionratioofthe plane measurement．At present，the insidedimension far evenO．1nm．However measuringlagged reachedlnm been crosssectionand errorof for pinhole， measurement shape behind。High．precisionany andblindholeis tobesolvedinmicroinsidedimension inclined exigent pinhole field． measurement onthis a non—contact Based situation，thispaperproposescapacitive and methodsindomestiC method small measurement many aperture byinvestigating automatic forsmall onabroad．A insidediameter measuringsystem high—precision holeisless diameterof holeandinclined hole，blindhole，deep aperture(the through reach1 crosssection can its’any ratio(it 0-20)and Omm)，biglength—diameter than妒l solvecoaxial traceable can problem