微机械加工电容压力传感器及信号处理技术研究.pdfVIP

摘 要 电容式传感器具有结构简单、灵敏度高，动态特性好、对辐射和 强烈振动等恶劣条件适应性强、价格便宜等一系列优点。但是，电容 式传感器生产时电容引线困难、输出信号受干扰和温度影响较大、输 出特性存在非线性等问题制约了电容式传感器的生产及应用。 本课题中研制了一种新型微机械加工传感器，解决了引线封装问 题；设计了一种信号调理电路，解决了微小电容变化量的精密检测和 信号放大问题；同时用单片机实现了输出信号的温度和非线性的软件 补偿。 关键词：电容式传感器信号调理温度补偿非线性补偿 ABSTRACT hasaIotof of sensor structure。 Capacitor advantagessimple excellenl characteristicand highsensitivity, dynamic strong to resistance and violent temperature，radiationvibration，but high with therearealsosome as Jow-pnce。While such disadvantages down—lead drift inconvenience，outputsignaldisturbance．temperature and nonlinear}nfluence。whichlimitits application． Thisthesis anew of sensorwithmicro- developstypecapacitor mechanicalto thedown-lead not process simplify encapsulation．It a circuit and the tomeasure on)ydesignssignalconditioning amplify of variation also the tiny accomplishes capacitance，but temperature and non-linear software compensationby words：Capacitor Key sensor。Signal Compensation，Non—tinear