厚膜电容压力传感器微位移测量研究.pdf

中文摘要 感器膜片在小挠度形变的情况下，当膜片中心点偏移量小于 4 μm 时，电容相对 误差小于 1.10%，可以采用均布载荷模型来计算电容值，当膜片中心点偏移量大 于 4 μm 时，要考虑传感器膜片的实际工作情况，采用集中载荷模型来计算电容 值，以提高其测量的精度及准确度。 关键词：厚膜电容压力传感器，PZT 定位器，均布载荷，集中载荷，MATLAB II 英文摘要 Research on micro-displacement measurements with thick-film capacitive pressure sensors ABSTRACT In the late 1980s, thick-film capacitive pressure sensors is used to measure fluid pressure sensor, which is made by ceramic materials with special process. It has advantage of wide working temperature range, resistance to overloads strong, creep and little hysteresis, direct contact with corrosive liquids. It is widely used in petroleum, chemical, food, power machinery, biomedical engineering, meteorology, geology, seismic surveys, etc. Normally, the thick-film capacitive pressure sensors is used to measure pressure. For example, for atmospheric ,water and sound pressure measurement, etc. In these applications, the sensor’s diaphragm is working under uniform loading conditions, the uniform force model used to analyze and study. There is also an important application that can be used to measure displacement, for instance, PZT piezoelectric ceramic precision displacement measurement. The piezoelectric ceramic PZT probe is directly contact with the sensor flexible diaphragm. Through giving voltage to the two ends of the piezoelectric ceramic PZT with deforming, it pushes the elastic deformation of the sensor diaphragm with the output capacitance changing. Then, PZT piezoelectric ceramics sensor’s probe is contact with the center of diaphragm, if we use the uniform load model to calculate and analyze, it will cause error in micro displacement