非球面超精密抛光技术研究现状_袁巨龙.pdf

48 23 Vol.48 No.23 2012 12 JOURNAL OF MECHANICAL ENGINEERING Dec. 2 0 1 2 DOI 10.3901/JME.2012.23.167 * 1, 2 1 2 1 2 2 (1. 410082 2. 310014) TG156 Review on Ultra-precision Polishing Technology of Aspheric Surface YUAN Julong1, 2 WU Zhe1 LÜ Binghai2 NGUYEN Ducnam1 LU Huizong2 ZHAO Ping2 (1. National Engineering Research Center for High Efficiency Grinding, Hunan University, Changsha 410082; 2. Key Laboratory of Special Purpose Equipment and Advanced Processing Technology of Ministry of Education, Zhejiang University of Technology, Hangzhou 310014) Abstract The requirement of profile accuracy and surface quality for aspherical surface has become higher and higher with the expanding application range and raising application precision demand. As the finishing process, the ultra-precision polishing method for aspherical surface is drawing great attention from countries around the world. For improving the precision and efficiency of aspheric surface polishing, an understanding of the mechanisms of material removal in ultra-precision aspheric polishing, as well as the sub-surface damage imparted, is essential prerequisites. Historical progress of aspheric polishing techniques is plotted, and based on the development of aspheric polishing methods, the present advanced ultra-precision aspher