原创力文档Eddy current measurement of the thickness of top Cu film of the multilayer interconnects in the integrated circuit （IC） manufacturing process.pdfVIP
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Eddy current measurement of the thickness of top Cu film of the multilayer interconnects in the integrated circuit （IC） manufacturing process.pdf
6 Front．Mech．Eng．2015，10(1)：1_6
evaluationforadvancedtechnologynodes．JoumaloftheElectro．
chemicalSociety,2013．160(12)：D3247_D3254
2．Quz，ZhaoQ，MengY，eta1．In—situmeasurementofCufilm
hticknessduringhteCMPprocessbyusingeddycurrentmehtod
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