原创力文档Effects of electric field fringe on performances of grid strip capacitive MEMS devices.pdfVIP
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Effects of electric field fringe on performances of grid strip capacitive MEMS devices.pdf
HIGH TECHNOLOGY LETFERSIVo1．17No
． 2lJun．20111PP．207～213
doi：10．3772／j．issn．1006-6748．2011．02．016
Effectsofelectricfieldfringeonperformancesof
grid stripcapacitiveMEM S devices①
DongLinxi(董林玺)一 ②，LiYon~ie， ranHaixia… ，SunLingling
( theKeyLaboratoryofRFCircuitsandSystemofMinistryofEducation，HangzhouDianziUniversity，Hangzhou310018，P．R．China)
( StateKeyLaboratoryofTransducerTechnology，ChineseAcademyofSciences，Shanghai200050，P．R．China)
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