Fabrication and its characteristics of hard coating Ti-Al-N system prepared by DC magnetron sputtering.pdfVIP
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Fabrication and its characteristics of hard coating Ti-Al-N system prepared by DC magnetron sputtering.pdf
RARE METALs
v0 1.3l 。No.2 。Apr .20 12 .p .173
DoI :l O.1007 /s 12 598- 0 12- 04 87 ·6
Fabr i at i on and i t s har a t er i st i s of har d oat i ng Ti - Al —N sys t em pr ep ar ed
by DC ma gnet r on sput t er i ng
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