原创力文档Fractal Characteristics and Microstructure Evolution of Magnetron Sputtering Cu Thin Films.pdfVIP
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Fractal Characteristics and Microstructure Evolution of Magnetron Sputtering Cu Thin Films.pdf
CHINESEJ0URNALOFM ECHANICALENGINEERING
Vo1．26，No．1，2013 ·137 ·
DOI：10．3901／CJME．2013．01．137，availableonlineatwww．springerlink．corn；www．cjmenet．com；www．cjmenet．com．cn
FractalCharacteristicsandM icrostructureEvolutionofM agnetronSputtering
CuThinFilms
DU Shiwen andLIYongtang
SchoolofMaterialsScienceandEngineering,TaiyuanUniversityofScienceandTechnology,T
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