高性能CMOS一氧化碳气体传感器优化设计.pdf

THE OPTIMUM DESIGN OF HIGH PERFORMANCE CMOS CO SENSOR ABSTRACT The ultimate goal of wireless sensor networks (WSN) is to develop ultra-low-power and miniature devices that can be widely distributed in remotely area. The monolithic integration of sensors ensures mass manufacturing with low-cost. Our primary goal is to design a gas sensor integration with readout circuit on same chip which can be easily implemented with post-CMOS process steps and satisfy the demand of WSN. The selectivity, stability, power, noise and compatibility with CMOS process issues are presented in this thesis. A unique phenomenon that the surface temperature of platinum film oscillates when it is exposed to carbon monoxide can be facilitated to enhance the selectivity significantly, which can identify carbon monoxide exclusively among the gas mixture. However, it can’t quantify the gases up to now. An approach is proposed to establish the relationship between the oscillation period and CO concentration based on non-linear system theory. The theoretic simulation results agree with the experiment results. The main challenge for gas sensor is the design of a micro-hotplate structure providing stable and uniform temperature to ensure a high sensitivity and selectivity to gases. Finite difference algorithm is developed to solve the problem of sensor temperature stability under ambient temperature interference. The simulation results are verified by PDEtool and ANSYS. It also reveals the uniformity of temperature profile on the sensing layer less than 0.4 ℃ variation. A sub-threshold voltage circuit is proposed to adjust the