抗热载流子效应工艺及器件结构的研究.pdfVIP

A Dissertation Submitted to Shanghai Jiao Tong University for Master Degree of Science Studies of the LDD process for HCE improvement Author ：Lu Yi Specialty: Software Engineering Advisor Ⅰ: Prof. Huang Qiyu School of Microelectronics Shanghai Jiao Tong University Shanghai, P.R.China July, 2009 抗热载流子效应的工艺及器件结构研究 摘 要 热载流子，是由于沟道电场中加速以及碰撞