晶体生长建模软件FEMAG-如何将直拉法模拟技术拓展到区熔法生长.ppt

* * * * * Typical FEMAG-FZ global unstructured mesh for heat transfer and induction heating FEMAGSoft ? 2013 Modeling of FZ growth (cont’d) FEMAGSoft ? 2013 FEMAG-FZ time-dependent simulation of the growth of a silicon crystal Use of an equivalent thermal conductivity Modeling of FZ growth (cont’d) Free interface constraining loci (secondary mesh) in FZ growth FEMAGSoft ? 2013 Modeling of FZ growth (cont’d) FEMAGSoft ? 2013 Inverse modeling in FZ growth much more difficult problem than in Cz growth can lead to misleading interpretations of the simulation results since completely inverse models